N° 71 avril 1980

Applications of Raman microprobe analysis to manufacture of semiconductor devices

Pagination : 43-44
Rubrique : Compte rendu des Premières journées d'étude sur les applications de la microsonde Mole

The current technology of the industry of semi-conductors produces systems with a big density of circuits. A contamination by particle, during the treatment, can pull short circuits or opened circuits in the system. For that reason, it is essential to know the composition of such contaminants to find their source, and the Raman microprobe showed to be an excellent tool of analysis in this case.